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Linear Air Bearing Stage PIglideA-121 High Precision Model

Linear Air Bearing Stage PIglideA-121 High Precision Model

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

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  • Cartesian Robot
  • encoder
  • Maintain air bearing stage

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Small Linear Air Bearing Stage A-143 High Precision Type

Small Linear Air Bearing Stage A-143 High Precision Type

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

  • Other machine elements
  • Cartesian Robot
  • encoder
  • Maintain air bearing stage

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